Fast, Consistent Solenoid for Atomic Layer Deposition

TLX developed a two-position, three-way pilot valve with performance tailored for ALD applications, including ultra-fast response, high operating temperature and compact design.

客户问题

Atomic layer deposition (ALD) films are applied in uniform, thin layers with atomic-level, repeatable control and complete conformity. A pulse of inert gas separates each dose of reactive chemicals, purging the chamber in preparation for the next application. The deposition process required a solution that could operate quickly through the cycles, under maximum pressure and temperature, while maintaining consistency over an extended life (>100 million cycles).

TLX 解决方案

The ALD application cycle requires multiple doses of reactive chemicals to be delivered sequentially into the processing chamber. TLX developed a two-position, three-way pilot valve with performance tailored for ALD applications, including ultra-fast response, high operating temperature and compact design. The component used minimal power, making it more cost-effective than competing designs.

查看设计方案

XX Atomic Layer Deposition Pilot Valve

Operating voltage: 12 to 30 Vdc
Operating pressure range: 0 to 500 kPa
Operating temperature: -40 to 200°C
Operating frequency: 100-300 Hz
Resistance: 48 +/- 4.8 ohms @ 20°C
Inductance: 68.6 mH
Flow Rate: 35 l/min @ 80 kPa
Leak Rate: < 2 cc/min
PWM pressure control: 10-90% duty cycle
PWM vacuum control: 10-90% duty cycle
Response time: < 6 ms
Burst pressure: 50 bar
Vibration: 20 G

TLX提供的任何组件，均可根据客户的不同系统、技术参数等要求进行设计和定制。本网站上的示例仅供说明目的。

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Localized production in USA and China
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Step 1 / Initial Review

Our engineering team works directly with you to determine the viability of your program and identify the best solution based on your specifications.

Step 2 / Quote

Quotes include all costs related to your project - tooling, prototype, piece part, production and project specific costs.

Step 3 / Design Review & Prototypes

Our engineering team reviews the design with you and makes any adjustments needed. Prototypes are built according to design specifications for testing.

Step 4 / Testing

Prototypes are tested according to your specifications, with all relevant test data provided to you for evaluation.

Step 5 / APQP

DFMEA’s, PFMEA’s, control plans and process flow diagrams are started to drive the product intent design.

Step 6 / Pre-Production

Working drawings are developed for production. A second prototype build and a set of production parts are made from tooling and thoroughly tested.

Step 7 / PPAP/Production

The final design along with the PPAP (Production Part Approval Process) is developed and the new product enters production.

Step 8 / Ongoing Improvements

Our team collaborates with you to continue making improvements to the product to best meet your needs, increasing efficiency and reducing cost.

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